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13. Semiconductors A (Silicon) » 13.3 Si Process・Interconnect・MEMS・Integration

[20a-E14-1~10] 13.3 Si Process・Interconnect・MEMS・Integration

Thu. Mar 20, 2014 9:00 AM - 11:45 AM E14 (E302)

11:00 AM - 11:15 AM

▲ [20a-E14-8] Improving Crystalline Quality of Pulsed-Laser-Microcrystallized Si Thin Films by the Two-Step Irradiation Method

^○（D）Lien Mai¹, Susumu Horita¹ (JAIST¹)

Keywords:laser,crystallization,TFT