The 61st JSAP Spring Meeting, 2014

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Oral presentation

13. Semiconductors A (Silicon) » 13.3 Si Process・Interconnect・MEMS・Integration

[20a-E14-1~10] 13.3 Si Process・Interconnect・MEMS・Integration

Thu. Mar 20, 2014 9:00 AM - 11:45 AM E14 (E302)

10:45 AM - 11:00 AM

[20a-E14-7] A New RTA Process for High-Performance Power MOSFET

○Yi Chen1, Takasi Noguti1 (UNIVERSITY OF THE RYUKYUS1)

Keywords:プロセス　,接合