Reinvestigation of the role of Ar in structural phase transformation of sputtered HfO<sub>2</sub>

Presentation information

Oral presentation

13. Semiconductors A (Silicon) » 13.5 Si-English Session

Thu. Mar 20, 2014 9:00 AM - 12:30 PM F10 (F406)

11:00 AM - 11:15 AM

^○Takamasa Iwai¹, Takeaki Yajima¹, Tomonori Nishimura¹, Kousuke Nagashio¹, Akira Toriumi¹ (Univ. of Tokyo¹)

Keywords:HfO2,スパッタ,Ar