The 61st JSAP Spring Meeting, 2014

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Oral presentation

06. Thin Films and Surfaces » 6.4 New thin-film materials

[20p-D6-1~8] 6.4 New thin-film materials

Thu. Mar 20, 2014 1:00 PM - 3:00 PM D6 (D209)

2:00 PM - 2:15 PM

[20p-D6-5] SnO2 thin films prepared by coplanar type surface discharge technique under magnetic field

○Syota Kanezashi1, Masato Tan1, Toshimichi Hanai1, Masayuki Okuya1 (Shizuoka Univ.1)

Keywords:沿面放電,プラズマ,酸化スズ