[20p-E2-1~6] 17.1 成長技術

[20p-E2-4] Comparing Characteristics of Graphene Films Grown by Surface Wave Assisted Microwave Plasma CVD using Camphor and Methane Precursors.

^○HareRamAryal，MadhuKayastha，HideoUchida，KoichiWakita，MasayoshiUmeno (Ｃｈｕｂｕ Ｕｎｉｖ．)

キーワード：Camphor,Graphene,Plasma CVD