9:30 AM - 9:45 AM
[13a-4C-3] Characterization of SiON/Si Structures by Ar/N2 Plasma Nitridation and Kr/O2 Plasma Oxidation at Low Temperature
Keywords:Nitridation,Oxidation
Oral presentation
13 Semiconductors » 13.3 Insulator technology
Sun. Sep 13, 2015 9:00 AM - 12:15 PM 4C (432)
座長:渡邉 孝信(早大),右田 真司(産総研)
9:30 AM - 9:45 AM
Keywords:Nitridation,Oxidation