[13a-4C-1~12] 13.3 Insulator technology

[13a-4C-3] Characterization of SiON/Si Structures by Ar/N₂ Plasma Nitridation and Kr/O₂ Plasma Oxidation at Low Temperature

〇yuta fujikawa¹, yoshitaka iwazaki¹, tomo ueno¹ (1.TUAT)

Keywords:Nitridation,Oxidation