10:15 AM - 10:30 AM
[13a-4C-6] An insulator-charging/dipole model of electric conduction through ALD-Al2O3 films
Keywords:Al2O3,charging,electric conduction
According to our previous reports, Au-gated ALD-Al2O3 capacitors allow a large leakage current after heating and recover insulation capability with time in air. These leakage currents follow a FN tunneling process that considers insulator charging. Here we further consider the effect of dipoles at an Al2O3/SiO2 interface, hence improving accuracy of the current-conduction analysis and extending application of the analysis to MIS capacitors with various gate materials.