[13a-4C-1~12] 13.3 Insulator technology

[13a-4C-6] An insulator-charging/dipole model of electric conduction through ALD-Al₂O₃ films

〇Atsushi Hiraiwa¹, Tatsuya Saito², Daisuke Matsumura², Hiroshi Kawarada^1,2 (1.RONL, Waseda Univ., 2.FSE, Waseda Univ.)

Keywords:Al2O3,charging,electric conduction

According to our previous reports, Au-gated ALD-Al₂O₃ capacitors allow a large leakage current after heating and recover insulation capability with time in air. These leakage currents follow a FN tunneling process that considers insulator charging. Here we further consider the effect of dipoles at an Al₂O₃/SiO₂ interface, hence improving accuracy of the current-conduction analysis and extending application of the analysis to MIS capacitors with various gate materials.