The 76th JSAP Autumn Meeting, 2015

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15 Crystal Engineering » 15.8 Crystal evaluation, impurities and crystal defects

[13p-1E-1~17] 15.8 Crystal evaluation, impurities and crystal defects

Sun. Sep 13, 2015 1:15 PM - 6:00 PM 1E (143)

座長:小野 敏昭(SUMCO),関口 隆史(NIMS)

5:15 PM - 5:30 PM

[13p-1E-15] Thermo-statistical modeling for getterings in a silicon wafer

Eiji Kamiyama1,2, 〇Kouji Sueoka1 (1.Okayama Pref. Univ., 2.Globalwafers)

Keywords:Si Wafer,Gettering