[13p-2W-1~16] 15.5 Group IV crystals and alloys

[13p-2W-5] Thermal stability of compressively strained Si/Si_1-xC_x heterostructures formed with the defect control by ion implantation

〇You Arisawa¹, Yusuke Hoshi¹, Keisuke Arimoto², Junji Yamanaka², Kiyokazu Nakagawa², Kentarou Sawano³, Noritaka Usami¹ (1.Nagoya Univ., 2.Univ. of Yamanashi, 3.Tokyo City Univ.)

Keywords:strained Si,ion implantation,thermal stability