The 76th JSAP Autumn Meeting, 2015

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15 Crystal Engineering » 15.5 Group IV crystals and alloys

[13p-2W-1~16] 15.5 Group IV crystals and alloys

Sun. Sep 13, 2015 1:15 PM - 5:30 PM 2W (234-2(North))

座長:黒澤 昌志(名大),都甲 薫(筑波大)

3:15 PM - 3:30 PM

[13p-2W-8] Selective Growth of Ge Thin Films by using Metal Organic Chemical Vapor Deposition

〇Tomoya Washizu1, Yuki Inuzuka1, Takanori Asano1,2, Shinichi Ike1,2, Wakana Takeuchi1, Osamu Nakatsuka1, Shigeaki Zaima1,3 (1.Grad. Sc. of Eng., Nagoya Univ., 2.JSPS Research Fellow, 3.ESI, Nagoya Univ.)

Keywords:germanium,MOCVD,selective growth