[13p-PB6-1~20] 21.1 Joint Session K

[13p-PB6-10] Fabrications of ZnCdO/ZnO Mulilayers by Sol-Gel Dip Method

〇Takashi Yasuda¹, Shuto Sasaki¹, Masaru Seino¹ (1.Ishinomaki Senshu Univ.)

Keywords:oxide semiconductor,ZnO,Sol-Gel Method

ZnCdO/ZnO multilayers were fabricated by sol-gel dip method, which is an economical way to produce thin film devices. We have successfull fabricated 12 nm periodic structures using this simple technique.