The 76th JSAP Autumn Meeting, 2015

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8 Plasma Electronics » 8.8 プラズマエレクトロニクス分科内招待講演

[14a-1F-3~4] 8.8 プラズマエレクトロニクス分科内招待講演

Mon. Sep 14, 2015 10:30 AM - 11:30 AM 1F (Reception Hall 1)

座長:杤久保 文嘉(首都大)

11:00 AM - 11:30 AM

[14a-1F-4] [INVITED　TALK] For the quantitative control of plasma processes

〇Tetsuya Tatsumi1 (1.DMRG, Sony Corp.)

Keywords:semiconductor,plasma,dry etching