11:00 AM - 11:30 AM
[14a-1F-4] [INVITED TALK] For the quantitative control of plasma processes
Keywords:semiconductor,plasma,dry etching
Oral presentation
8 Plasma Electronics » 8.8 プラズマエレクトロニクス分科内招待講演
Mon. Sep 14, 2015 10:30 AM - 11:30 AM 1F (Reception Hall 1)
座長:杤久保 文嘉(首都大)
11:00 AM - 11:30 AM
Keywords:semiconductor,plasma,dry etching