[14a-PA1-1~6] 6.1 Ferroelectric thin films

[14a-PA1-5] Comparing Pr and d_33,f by process monitor on PZT thin films

〇Natsumi Makimoto¹, Toshihiro Itoh^1,2, Takeshi Kobayashi¹ (1.AIST, 2.Tokyo Univ.)

Keywords:piezoelectric constant,remnant polarization

It is important to monitor on PZT thin films in a piezoelectric MEMS process step. We have reported that the piezoelectric constant d_33,f was related to the piezoelectric constant d₃₁ in last study.
In this study, we have verified that piezoelectric constant d_33,f was more efficient than remnant polarization Pr of process monitoring.