[14p-1C-1~16] 13.4 Si wafer processing /MEMS/Integration technology

[14p-1C-8] Controlling Nickelidation Process of Si Nanowire by Ar⁺ Ion Irradiation

〇XU ZHANG¹, Shuichiro Hashimoto¹, Kohei Takei¹, Jing Sun¹, Taiyu Xu¹, Shuhei Asada¹, Toshihiro Usuda¹, Motohiro Tomita^1,2,3, Ryosuke Imai³, Atsushi Ogura³, Takashi Matsukawa⁴, Meishoku Masashihara⁴, Takanobu Watanabe¹ (1.Waseda Univ., 2.JSPS Res. Fellow PD, 3.Meiji Univ., 4.AIST)

Keywords:process,nanowire,silicide