The 76th JSAP Autumn Meeting, 2015

Presentation information

Symposium

Symposium » Dielectric Thin Film Technology Beyond Borders: From Si to Non-Si

[14p-4C-1~6] Dielectric Thin Film Technology Beyond Borders: From Si to Non-Si

Mon. Sep 14, 2015 1:30 PM - 4:45 PM 4C (432)

座長:小山 正人(東芝),渡邉 孝信(早大)

2:00 PM - 2:30 PM

[14p-4C-2] High-μ channel and its MOS interface control

〇Tatsuro Maeda1, Tetsuji Yasuda1 (1.AIST)

Keywords:compound semiconductor,MOSFET