[14p-4C-1~6] Dielectric Thin Film Technology Beyond Borders: From Si to Non-Si

[14p-4C-5] Interface Engineering and Development of Gate Insulators for SiC Power MOS Devices

〇Heiji Watanabe¹, Takuji Hosoi¹ (1.Osaka Univ.)

Keywords:semiconductor,gate insulator,power device