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Sessions

Symposium » Dielectric Thin Film Technology Beyond Borders: From Si to Non-Si

[14p-4C-1~6] Dielectric Thin Film Technology Beyond Borders: From Si to Non-Si

[14p-4C-1] What were the key points in high-k gate stacks?

[14p-4C-2] High-μ channel and its MOS interface control

[14p-4C-3] GeO2/Ge interface control for Ge CMOS

[14p-4C-4] Progress and Challenges in SiC MOS Interface toward SiC Power Devices

[14p-4C-5] Interface Engineering and Development of Gate Insulators for SiC Power MOS Devices

[14p-4C-6] MOS interface technologies for GaN-based power devices

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[14p-4C-3] GeO₂/Ge interface control for Ge CMOS