The 76th JSAP Autumn Meeting, 2015

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7 Beam Technology and Nanofabrication » 7.6 Ion beams

[14p-4E-1~21] 7.6 Ion beams

Mon. Sep 14, 2015 12:30 PM - 6:15 PM 4E (437)

座長:阿保 智(阪大),瀬木 利夫(京大),柳沢 淳一(滋賀県立大)

5:15 PM - 5:30 PM

[14p-4E-18] Fundamental Study for Cluster SIMS Analysis under Low Pressure

〇Kanji Suzuki1, Masakazu Kusakari1, Makiko Fujii1, Toshio Seki1, Takaaki Aoki1, Jiro Matsuo1 (1.Kyoto Univ.)

Keywords:SIMS,GCIB