The 76th JSAP Autumn Meeting, 2015

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Oral presentation

7 Beam Technology and Nanofabrication » 7.6 Ion beams

[14p-4E-1~21] 7.6 Ion beams

Mon. Sep 14, 2015 12:30 PM - 6:15 PM 4E (437)

座長:阿保 智(阪大),瀬木 利夫(京大),柳沢 淳一(滋賀県立大)

12:45 PM - 1:00 PM

[14p-4E-2] Substrate Temperature Dependence of C-N Thin Firm Deposited by Ionic Liquid Ion Beam

〇Yuki Hoshide1, Mitsuaki Takeuchi1, Ryuto Hiromichi1, Gikan Takaoka1 (1.Kyoto Univ)

Keywords:Ion beam,Ionic liquid