The 76th JSAP Autumn Meeting, 2015

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7 Beam Technology and Nanofabrication » 7.6 Ion beams

[14p-4E-1~21] 7.6 Ion beams

Mon. Sep 14, 2015 12:30 PM - 6:15 PM 4E (437)

座長:阿保 智(阪大),瀬木 利夫(京大),柳沢 淳一(滋賀県立大)

12:30 PM - 12:45 PM

△ [14p-4E-1] c-axis parallel polarity inverted multilayer film by grazing ion beam deposition

〇Takeshi Mori1, Masashi Suzuki2, Takahiko Yanagitani2 (1.Nagoya Inst. Tech., 2.Waseda Univ.)

Keywords:ion beam,polarity inverted,ZnO