The 76th JSAP Autumn Meeting, 2015

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Poster presentation

6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[14p-PA9-1~14] 6.2 Carbon-based thin films

Mon. Sep 14, 2015 4:00 PM - 6:00 PM PA9 (Event Hall)

4:00 PM - 6:00 PM

△ [14p-PA9-13] Estimation of DLC film deposition using RGB measurement of plasma emission

〇(B)Masasi Saitou1, Yuta Kawachi1, Akihiko Homma1, Kenji Hirakuri1, Yasuharu Ohgoe1 (1.Tokyo Denki Univ.)

Keywords:Daimond-like Carbon,plasma emission