[14p-PB4-1~6] 1.6 Ultrasonics

△ [14p-PB4-2] Cantilever vibration measurement using impedance-loaded passive SAW sensor

〇Masaki Oishi¹, Hiromitsu Hamashima¹, Jun Kondoh¹ (1.Shizuoka Univ.)

Keywords:surface acoustic wave

In recent years, it is desired to develop a sensor for a structural health monitoring (SHM), such as buildings, bridges, and tunnels. A typical example of a sensor for the SHM is a vibration sensor. As the vibrating frequency and attenuation coefficient of the structure are measured by using the vibration sensor, it is possible to detect the deterioration of the structure. In this paper, we propose the vibration sensor using an impedance-load passive SAW sensor. The center frequency of the SAW device used was 13.5 MHz. We measured the vibration frequency of the cantilever by using the vibration sensor. The results indicate that the sensor proposed can be applied for the SHM.