The 76th JSAP Autumn Meeting, 2015

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Poster presentation

15 Crystal Engineering » 15.8 Crystal evaluation, impurities and crystal defects

[14p-PB7-1~5] 15.8 Crystal evaluation, impurities and crystal defects

Mon. Sep 14, 2015 4:00 PM - 6:00 PM PB7 (Shirotori Hall)

4:00 PM - 6:00 PM

[14p-PB7-1] Silicon Interstitials by Over Heated Melt during Pulling Stop of CZ Silicon Crystals

〇Takao Abe1, Toru Takahashi1, Koun Shirai2 (1.ShinEtsu Handotai, 2.ISIR, Osaka Univ.)

Keywords:CZ,Si,point defects