[14p-PB7-1~5] 15.8 Crystal evaluation, impurities and crystal defects

△ [14p-PB7-2] First principles analysis on proximity gettering sites formed by C₃H₅ cluster ion implantations

〇sho shirasawa¹, Koji Sueoka¹, Tadashi Yamaguchi², Kazuyoshi Maekawa³ (1.Okayama Pref. Univ., 2.Renesas Electronics, 3.Renesas Semiconductor Manufacturing)

Keywords:Proximity gettering,C3H5 cluster ion implantation,first principles calculation