[15a-1D-1~11] 15.4 III-V-group nitride crystals

[15a-1D-3] Ion irradiation effect on internal stress in single-crystal c-BN thin films

〇Kazuyuki Hirama¹, Yoshitaka Taniyasu¹, Shin-ichi Karimoto¹, Hideki Yamamoto¹, Kazuhide Kumakura¹ (1.NTT BRL)

Keywords:cubic boron nitride,ion-beam-assisted MBE,diamond