The 76th JSAP Autumn Meeting, 2015

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Oral presentation

15 Crystal Engineering » 15.4 III-V-group nitride crystals

[15a-1D-1~11] 15.4 III-V-group nitride crystals

Tue. Sep 15, 2015 8:45 AM - 11:45 AM 1D (141+142)

座長:小林 康之(弘前大),太田 実雄(東大)

9:00 AM - 9:15 AM

[15a-1D-2] Chemical bonding state analysis for BN films prepared by reactive plasma-assisted coating

〇Shigehiko Hasegawa1, Masao Noma2, Michiru Yamashita3, Koji Eriguchi4 (1.ISIR Osaka Univ., 2.SHINKO SEIKI, 3.Hyogo Pref. Inst. Technol., 4.Kyoto Univ.)

Keywords:Boron nitride,Chemical bonding state analysis