The 76th JSAP Autumn Meeting, 2015

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15 Crystal Engineering » 15.4 III-V-group nitride crystals

[15a-1D-1~11] 15.4 III-V-group nitride crystals

Tue. Sep 15, 2015 8:45 AM - 11:45 AM 1D (141+142)

座長:小林 康之(弘前大),太田 実雄(東大)

9:30 AM - 9:45 AM

[15a-1D-4] Characterization of RF plasma nitridated α-(AlGa)2O3 for AlGaN growth

〇Akira Buma1, Masuda Nao1, Araki Tsutomu1, Oda Masaya2, Hitora Toshimi2 (1.Ritsumeikan Univ., 2.FLOSFIA)

Keywords:(AlGa)2O3