[15a-2G-1~11] 3.12 Nanoscale optical science and near-field optics

△ [15a-2G-7] Highly-efficient micro-optical retarder based on Au nanofin array embedded in dielectrics

〇(D)Miho Ishii^1,2, Kentaro Iwami¹, Norihiro Umeda¹ (1.Tokyo Univ. of Agri & Tech, 2.JSPS Research Fellow)

Keywords:metasurface,waveplate,nanofin

Au nanofin array embedded in dielectrics for highly-efficient micro-waveplate at visible wavelength was demonstrated. Strong dichroism and fragility were critical issues for our previous Au nanofin array, despite of its giant birefringence and high transmittance. In order to solve these problems, Au nanofin structure was embedded in dielectric material using glass reactive ion etching, nanocoating lithography and spin-on-glass coating. Fabricated nanofin retarder realized low dichroism and improved transmittance. Furthermore, mechanical toughness and smooth surface were also demonstrated.