Layer by layer etching of LaAlSiOx

Presentation information

Oral presentation

8 Plasma Electronics » 8.4 Plasma etching

Tue. Sep 15, 2015 9:00 AM - 12:15 PM 2Q (231-1)

座長:辰巳哲也(ソニー),石川健治(名大)

11:00 AM - 11:15 AM

〇Kazuhito Furumoto¹, Kazuhisa Matsuda¹, Toshiyuki Sasaki¹, Mitsuhiro Omura¹, Itsuko Sakai¹, Hisataka Hayashi¹ (1.Toshiba.Corp.)

Keywords:Etching,High-k