The 76th JSAP Autumn Meeting, 2015

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Oral presentation

8 Plasma Electronics » 8.2 Plasma measurements and diagnostics

[15a-2V-1~10] 8.2 Plasma measurements and diagnostics

Tue. Sep 15, 2015 9:00 AM - 11:30 AM 2V (234-1(South))

座長:佐々木 浩一(北大)

9:00 AM - 9:15 AM

[15a-2V-1] Measurement of hydrogen atom density in remote plasmas

〇Shota Nunomura1, Hirotaka Katayama2, Isao Yoshida2,3 (1.AIST, 2.Panasonic, 3.PVTEC)

Keywords:hydrogen atom,VUVAS