Oral presentation

[15a-2V-1~10] 8.2 Plasma measurements and diagnostics

Tue. Sep 15, 2015 9:00 AM - 11:30 AM 2V (234-1(South))

座長:佐々木浩一(北大)

△：Young Scientist Oral Presentation Award Applied
▲：English Presentation
▼：Both Award Applied and English Presentation

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9:00 AM - 9:15 AM

[15a-2V-1] Measurement of hydrogen atom density in remote plasmas

〇Shota Nunomura¹, Hirotaka Katayama², Isao Yoshida^2,3 (1.AIST, 2.Panasonic, 3.PVTEC)

9:15 AM - 9:30 AM

▲ [15a-2V-2] Vibrational and Rotational Temperature Dependence of NH in Microwave N₂-H₂ Mixture Gas Discharge

〇(D)HAO TAN¹, Atsushi Nezu¹, Hiroshi Akatsuka¹ (1.Tokyo Tech.)

9:30 AM - 9:45 AM

[15a-2V-3] Measurement of N₂ Rotational Temperature Distribution in Atmospheric Positive DC Glow Corona by Spectroscopic Imaging

〇(M1)Ryo Sasamoto¹, Hideaki Orii¹, Takao Matsumoto¹, Yasuji Izawa¹, Kiyoto Nishijima¹ (1.Fukuoka Univ.)

9:45 AM - 10:00 AM

[15a-2V-4] Surface wave probe measurement of electron density in pulse-modulated plasma etch system

〇YOSHINOBU OHYA¹, MANABU IWATA¹, HIDEO SUGAI² (1.TEL Miyagi, 2.Chubu Univ.)

10:00 AM - 10:15 AM

[15a-2V-5] The influence of distribution of neutral beam energy by process pressure

〇Yasuaki Sakakibara¹, Yoshiyuki Kikuchi^1,2, Seiji Samukawa² (1.Tokyo Electron, 2.Tohoku Univ.)

10:15 AM - 10:30 AM

△ [15a-2V-6] Vibrational sum-frequency generation spectroscopy of O-H structures at water surface influenced by plasma-generated radicals and ions

〇(PC)Takahiro Kondo¹, Tsuyohito Ito¹ (1.Osaka Univ.)

10:30 AM - 10:45 AM

△ [15a-2V-7] Effect of Argon and Chlorine Plasma to GaN Films

〇(M1)Yoshitsugu Banno¹, Daisuke Ogawa¹, Yoshitaka Nakano¹, Keiji Nakamura¹ (1.Chubu Univ.)

10:45 AM - 11:00 AM

△ [15a-2V-8] Physical Interpretation of Laser-driven EUV Light Source by Measurement of Laser Absorption

〇(PC)Hiraku Matsukuma¹, Tatsuya Hosoda¹, Shinsuke Fujioka¹, Hiroaki Nishimura¹, Tatsuya Yanagida², Koichiro Koge², Hiroaki Tomuro², Yasushi Takeuchi³, Atsushi Sunahara³ (1.Osaka Univ., 2.GigaPhoton, 3.Inst. Laser Tech.)

11:00 AM - 11:15 AM

[15a-2V-9] Development of a measurement system of ionic charge, electron density, and electron temperature for high-Z Soft X-ray light source plasmas

〇Kentarou Tomita¹, Yuta Sato¹, Nima Bolouki¹, Toshiaki Eguchi¹, Syoichi Tsukiyama¹, Kiichiro Uchino¹ (1.Kyushu Univ.)

11:15 AM - 11:30 AM

▲ [15a-2V-10] Measurements on Nanosecond Pulsed Streamers Using Laser Thomson Scattering

〇(PC)Nima Bolouki¹, Kentaro Tomita¹, Kiichiro Uchino¹ (1.Kyushu Univ.)

Sessions

8 Plasma Electronics » 8.2 Plasma measurements and diagnostics

[15a-2V-1~10] 8.2 Plasma measurements and diagnostics

[15a-2V-1] Measurement of hydrogen atom density in remote plasmas

▲ [15a-2V-2] Vibrational and Rotational Temperature Dependence of NH in Microwave N₂-H₂ Mixture Gas Discharge

[15a-2V-3] Measurement of N₂ Rotational Temperature Distribution in Atmospheric Positive DC Glow Corona by Spectroscopic Imaging

[15a-2V-4] Surface wave probe measurement of electron density in pulse-modulated plasma etch system

[15a-2V-5] The influence of distribution of neutral beam energy by process pressure

△ [15a-2V-6] Vibrational sum-frequency generation spectroscopy of O-H structures at water surface influenced by plasma-generated radicals and ions

△ [15a-2V-7] Effect of Argon and Chlorine Plasma to GaN Films

△ [15a-2V-8] Physical Interpretation of Laser-driven EUV Light Source by Measurement of Laser Absorption

[15a-2V-9] Development of a measurement system of ionic charge, electron density, and electron temperature for high-Z Soft X-ray light source plasmas

▲ [15a-2V-10] Measurements on Nanosecond Pulsed Streamers Using Laser Thomson Scattering

Authentication

Sessions

8 Plasma Electronics » 8.2 Plasma measurements and diagnostics

[15a-2V-1~10] 8.2 Plasma measurements and diagnostics

[15a-2V-1] Measurement of hydrogen atom density in remote plasmas

▲ [15a-2V-2] Vibrational and Rotational Temperature Dependence of NH in Microwave N2-H2 Mixture Gas Discharge

[15a-2V-3] Measurement of N2 Rotational Temperature Distribution in Atmospheric Positive DC Glow Corona by Spectroscopic Imaging

[15a-2V-4] Surface wave probe measurement of electron density in pulse-modulated plasma etch system

[15a-2V-5] The influence of distribution of neutral beam energy by process pressure

△ [15a-2V-6] Vibrational sum-frequency generation spectroscopy of O-H structures at water surface influenced by plasma-generated radicals and ions

△ [15a-2V-7] Effect of Argon and Chlorine Plasma to GaN Films

△ [15a-2V-8] Physical Interpretation of Laser-driven EUV Light Source by Measurement of Laser Absorption

[15a-2V-9] Development of a measurement system of ionic charge, electron density, and electron temperature for high-Z Soft X-ray light source plasmas

▲ [15a-2V-10] Measurements on Nanosecond Pulsed Streamers Using Laser Thomson Scattering

Authentication

▲ [15a-2V-2] Vibrational and Rotational Temperature Dependence of NH in Microwave N₂-H₂ Mixture Gas Discharge

[15a-2V-3] Measurement of N₂ Rotational Temperature Distribution in Atmospheric Positive DC Glow Corona by Spectroscopic Imaging