[15p-2B-1~16] 12.7 Biomedical Engineering and Biochips

△ [15p-2B-3] Development of LSI chip-embedded Si Neural Probe with Flexible cable
for In Vivo Experiment

〇Yusaku Suzuki¹, Takaharu Tani¹, Takuya Harashima¹, Hisashi Kino², Takafumi Fukushima¹, Tetsu Tanaka^1,3 (1.Dept. of Bioengineering and Robotics Tohoku Univ, 2.FRIS Tohoku Univ, 3.Dept. of Biomedical Engineering Tohoku Univ)

Keywords:Intelligent Neural recording system,Si neural probe