3:15 PM - 3:30 PM
[15p-2L-7] Quantitative Analysis of Crystal Structure Change Under electric Filed by XRD Measurement for (100)/(001)-oriented Tetragonal Pb(Zr, Ti)O3 Films
Keywords:PZT
In-situ XRD measurement was carried out for PZT films and quantitatively compared with the obtained electromechanical properties.