[15p-2L-1~13] 6.1 Ferroelectric thin films

[15p-2L-7] Quantitative Analysis of Crystal Structure Change Under electric Filed by XRD Measurement for (100)/(001)-oriented Tetragonal Pb(Zr, Ti)O₃ Films

〇Hiroshi Funakubo¹, Naoya Oshima¹, Takao Shimizu¹, Mitsumasa Nakajima¹, Yoshitaka Ehara¹, Takahiro Oikawa¹, Hiroshi Uchida² (1.Tokyo Tech., 2.Sophia Univ.)

Keywords:PZT

In-situ XRD measurement was carried out for PZT films and quantitatively compared with the obtained electromechanical properties.