3:45 PM - 4:00 PM
△ [15p-2L-8] Growth of epitaxial orthorhombic HfO2-based films on Si substrate
Keywords:ferroelectric,hafnia,orthorhombic
Oral presentation
6 Thin Films and Surfaces » 6.1 Ferroelectric thin films
Tue. Sep 15, 2015 1:45 PM - 5:15 PM 2L (2F Lounge 2)
座長:藤沢 浩訓(兵庫県立大)
3:45 PM - 4:00 PM
Keywords:ferroelectric,hafnia,orthorhombic