[15p-4E-1~23] 7.2 Applications and technologies of electron beams

[15p-4E-20] Beam focusing characteristics of volcano-structured double-gate Spindt-type field emitter arrays

〇Masayoshi Nagao¹, Yasuhito Gotoh², Tomoaki Masuzawa³, Yoichiro Neo³, Hidenori Mimura³ (1.AIST, 2.Kyoto Univ., 3.Shizuoka Univ.)

Keywords:field emitter array,image sensor,double-gated FEA

We are developing elemental technology for image sensor with high radiation tolerance by using field emitter array as a signal read out device. The device should be driven in matrix mode and should have beam-focusing function for getting smaller pixel size. For such devices, we have already proposed volcano-structured double-gate Spindt-type FEA (VDGS-FEA) and reported its fabrication. In this presentation, we will report on the beam focusing characteristics of VDGS-FEA.