[16a-1B-1~12] 21.1 Joint Session K

[16a-1B-2] Carrier transport of polycrystalline Ga-doped ZnO films prepared by reactive plasma deposition with dc arc discharge: oxygen gas flow rate and discharge current

〇Junichi Nomoto¹, Hisao Makino^1,2, Hisashi Kitami³, Toshiyuki Sakemi³, Tetsuya Yamamoto¹ (1.Research Inst., Kochi Univ. Tech., 2.Kochi Univ. Tech., 3.Sumitomo Heavy Ind, Ltd.)

Keywords:Transparent Conductive Oxide,ZnO