[16a-1B-1~12] 21.1 Joint Session K

△ [16a-1B-6] Physical property control of zinc oxide thin film by hydrogen ion beam irradiation at low temperature

〇Ryo Nakayama¹, Mitsuhiko Maesato¹, Takashi Nagaoka², Makoto Arita², HIroshi Kitagawa^1,3 (1.Kyoto Univ., 2.Kyushu Univ., 3.JST-CREST)

Keywords:zinc oxide,hydrogen,ion beam

Hydrogen introduction is a powerful method to control physical properties of materials. However conventional methods are available to a few materials and need very long time to introduce much hydrogen. Now we pay attention to the hydrogen ion beam irradiation as an efficient way of the hydrogen introduction. In this study, we introduced hydrogen into zinc oxide thin films at low temperature by our home-made hydrogen ion beam apparatus. Hydrogen ion beam irradiation effects were studied by in-situ variable-temperature electrical conductivity measurements.