[16a-1B-1~12] 21.1 Joint Session K

[16a-1B-7] Transparent conductive properties of ZnO films on sapphire C-plane substrates

〇Housei Akazawa¹ (1.NTT DIC)

Keywords:ZnO,transparent conductive film,sapphire substrate

Transparent conductive ZnO-based films are normally deposited on glass substrate and the resistivity depends crtirically on the thickness. We investigated how the kinds of substrate affect the resistivity. The thickness dependence of resistivity of ZnO films deposited on SiN_x films and glass substrates were actually the same. However, when deposited on sapphire C-planes at elevated temperatures, the thickness dependence curve exhibited a sationary feature, which is expicable in terms of 2DEG formed at the epitaxial interface between ZnO and sapphire.