[16a-2E-1~9] 3.13 Semiconductor optical devices

[16a-2E-8] Transverse-mode coupled cavity VCSELs with high speed beam switching

〇Masanori Nakahama¹, Xiaodong Gu¹, Takahiro Sakaguchi¹, Akihiro Matsutani², Fumio Koyama¹ (1.Tokyo Tech., 2.MEMS process, Tokyo Tech.)

Keywords:VCSEL

A novel high speed and large deflection angle (>30°) beam switching in transverse-mode coupled cavity VCSEL is proposed and demonstrated. The record-high angular switching speed of 1.3×10¹¹ °/s is achieved with narrow beam divergence of below 4° and extinction ratio of 8 dB.