[16a-2R-1~11] 13.2 Exploratory Materials, Physical Properties, Devices

[16a-2R-2] High Density Formation of Fe-silicide Nanodots Induced by Remote H₂ Plasma and Characterization of Their Crystalline Structure and Magnetic Properties

〇Hai Zhang¹, Katsunori Makihara¹, Akio Ohta¹, Seiichi Miyazaki¹ (1.Nagoya Univ.)

Keywords:iron silicide,Hydrogen Plasma,Fe3Si