[16a-4E-9~12] 7.3 Micro/Nano patterning and fabrication

[16a-4E-12] Rapid Thermally Directed Self-Assembly of Amphiphilic Liquid-Crystalline Diblock Copolymer into Quasi-Long-Range-Ordered 2D Vertical Cylinder Arrays

〇Toru Yamaguchi¹, Motonori Komura³, Keiji Nagai², Akira Fujiwara¹, Hiroshi Yamaguchi¹, Tomokazu Iyoda² (1.NTT BRL, 2.Tokyo Inst. Tech., 3.NIT, Numazu College)

Keywords:lithography,block copolymer,self-assembly