12:00 PM - 12:15 PM
[16a-4E-12] Rapid Thermally Directed Self-Assembly of Amphiphilic Liquid-Crystalline Diblock Copolymer into Quasi-Long-Range-Ordered 2D Vertical Cylinder Arrays
Keywords:lithography,block copolymer,self-assembly
Oral presentation
7 Beam Technology and Nanofabrication » 7.3 Micro/Nano patterning and fabrication
Wed. Sep 16, 2015 11:15 AM - 12:15 PM 4E (437)
座長:山本 治朗(日立)
12:00 PM - 12:15 PM
Keywords:lithography,block copolymer,self-assembly