The 76th JSAP Autumn Meeting, 2015

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8 Plasma Electronics » 8.3 deposition of thin film and surface treatment

[16p-2Q-1~13] 8.3 deposition of thin film and surface treatment

Wed. Sep 16, 2015 1:45 PM - 5:00 PM 2Q (231-1)

座長:荻野 明久(静岡大)

4:30 PM - 4:45 PM

[16p-2Q-12] Evaluation of plasma uniformity with wafer type plasma indicator

〇YU YAMAKAWA1, KEITA HISHIKAWA1, HIROKAZU MIYAZAKI1, KEIKO NAKAMURA1, KAZUHIRO UNEYAMA1 (1.Sakura Color Products Corp.)

Keywords:plasma,indicator,uniformity