[16p-4E-1~11] 7.3 Micro/Nano patterning and fabrication

[16p-4E-11] Study of the Resistance of Antisticking Layers against Repeated UV nanoimprint

〇Shuso Iyoshi¹, Makoto Okada¹, Yuichi Haruyama¹, Shinji Matsui¹ (1.Univ. of Hyogo)

Keywords:UV nanoimprint,resinstance of antisticking layer,additive

The study of the resistance of mold Antisticking layer (ASL) was conducted in a way that water contact angles in the mold surface were determined after repeated UV nanoimprint. It was found that the resistance od ASL was largely extended when an additive was used together with a levering agent, which is occasionally added for the enhancement of contact between a resist and a substrate,