The 62nd JSAP Spring Meeting, 2015

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Poster presentation

6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[11a-P4-1~18] 6.2 Carbon-based thin films

Wed. Mar 11, 2015 9:30 AM - 11:30 AM P4 (Gymnasium)

9:30 AM - 11:30 AM

[11a-P4-11] Characterization of a-C:H Films Fabricated by Various Hydrocarbon Gases at Cryogenic Temperature

〇Takashi Saito1, Eiji Naito1, Naoki Kobayashi1, Satou tetsuya1 (1.Univ of Yamanashi,)

Keywords:amorphous carbon,Cryogenic Temperature