The 62nd JSAP Spring Meeting, 2015

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Poster presentation

6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[11a-P4-1~18] 6.2 Carbon-based thin films

Wed. Mar 11, 2015 9:30 AM - 11:30 AM P4 (Gymnasium)

9:30 AM - 11:30 AM

△ [11a-P4-12] Analysis on interface of DLC film fabricated by RF plasma CVD using X-ray reflectometry

〇Tooru Harigai1, Yuki Yasuoka1, Hiroshi Furuta1, 2, Akimitsu Hatta1, 2 (1.Kochi Univ. Technol., 2.Center for Nanotechnol., Research Inst., Kochi Univ. Technol.)

Keywords:diamond-like carbon,amorphous carbon,X-ray reflectometry