The 62nd JSAP Spring Meeting, 2015

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15 Crystal Engineering » 15.4 III-V-group nitride crystals

[11p-B1-1~20] 15.4 III-V-group nitride crystals

Wed. Mar 11, 2015 1:15 PM - 6:45 PM B1 (6B-101)

6:30 PM - 6:45 PM

△ [11p-B1-20] Optical characterization of m-plane Al1-xInxN films using spectroscopic ellipsometry

〇(B)Daiki Kagaya1, Yoshiki Yamazaki1, Hirotaka Ikeda2, Kenji Fujito2, Kazunobu Kojima1, Shigefusa Chichibu1 (1.IMRAM-Tohoku Univ., 2.Mitsubishi Chemical Corporation)

Keywords:AlInN,spectroscopic ellipsometry